Atmospheric pressure plasma processing apparatus, atmospheric pressure plasma processing method using the same, and atmospheric pressure plasma processing method of powder composed of conductive material

摘要

PROBLEM TO BE SOLVED: To suppress the occurrence of arc discharge or abnormal electric discharge in a plasma-generation region to process a conductive material with stability.SOLUTION: An atmospheric pressure plasma processing apparatus 100 comprises: a first insulator tube 121 made of a first insulative material; a pair of electrodes 122 provided on the outer peripheral face of the first insulator tube 121 to be spaced apart from each other, a voltage being applied between the pair of electrodes 122; a second insulator tube 130 made of a second insulative material, which is inserted inside the first insulator tube 121 so as to spaced apart from the first insulator tube 121; a supplying part 190 for supplying a process gas into the second insulator tube 130; and a power-source part 180 for applying the voltage between the pair of electrodes 122. In the atmospheric pressure plasma processing apparatus, the power-source part 180 applies the voltage between the pair of electrodes 122 thereby to produce plasma of the process gas in the second insulator tube 130, and the plasma is used to process an object 1 to be processed.SELECTED DRAWING: Figure 1