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Aberration calculation apparatus, aberration calculation method, image processing apparatus, image processing method, and electron microscope
Aberration calculation apparatus, aberration calculation method, image processing apparatus, image processing method, and electron microscope
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机译:像差计算设备,像差计算方法,图像处理设备,图像处理方法和电子显微镜
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摘要
An aberration computing device (100) includes a fitting section (48) for fitting line profiles of a diffractogram taken in radial directions to a fitting function and finding fitting parameters of the fitting function and a computing section (49) for finding at least one of an amount of defocus and two-fold astigmatism, based on the fitting parameters.
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