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Polishing abrasive, polishing slurry, method for polishing hard brittle material, and method for producing hard brittle material
Polishing abrasive, polishing slurry, method for polishing hard brittle material, and method for producing hard brittle material
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机译:研磨剂,研磨液,硬质脆性材料的研磨方法以及硬质脆性材料的制造方法
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摘要
Provided are abrasive grains and a polishing slurry capable of achieving both high polishing speed and surface smoothness for hard and brittle materials such as sapphire. A polishing abrasive used for polishing a hard and brittle material, characterized in that it is an inorganic oxide powder containing connected particles having one or more neck portions and having an average particle diameter of 3 μm or less. Abrasive grains to make.
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