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Sensor integrated metal dielectric filters for solar-blind silicon ultraviolet detectors
Sensor integrated metal dielectric filters for solar-blind silicon ultraviolet detectors
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机译:传感器集成的金属介电滤波器,用于日盲硅紫外线探测器
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摘要
A filter for electromagnetic radiation including one or more dielectric spacer regions and one or more reflective regions integrated on a semiconductor substrate, the semiconductor substrate including a semiconductor photodetector, such that the filter transmits ultraviolet radiation to the semiconductor photodetector, the ultraviolet radiation having a range of wavelengths, and the filter suppresses transmission of electromagnetic radiation, having wavelengths outside the range of wavelengths, to the semiconductor photodetector.
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