首页>
外国专利>
NONLINEAR CONTROL OF MASS FLOW CONTROLLER DEVICES USING SLIDING MODE
NONLINEAR CONTROL OF MASS FLOW CONTROLLER DEVICES USING SLIDING MODE
展开▼
机译:基于滑模的质量流量控制器的非线性控制
展开▼
页面导航
摘要
著录项
相似文献
摘要
The disclosed embodiments include a mass flow controller that implements a systematic sliding mode control algorithm that achieves robust and consistent flow-rate set-point tracking. Advantages of the disclosed embodiments include, but not limited to, rapid prototyping of easy-to-maintain embedded firmware and ease-of-tuning of controller parameters, which significantly reduces complexity of controller tuning. Other embodiments, advantages, and novel features are set forth in the detailed description.
展开▼