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Aware system, method and computer program product for detecting overlay-related defects in multi-patterned fabricated devices
Aware system, method and computer program product for detecting overlay-related defects in multi-patterned fabricated devices
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机译:用于检测多图案制造设备中与覆盖相关的缺陷的感知系统,方法和计算机程序产品
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摘要
A design aware system, method, and computer program product are provided for detecting overlay-related defects in multi-patterned fabricated devices. In use, a design of a multi-patterned fabricated device is received by a computer system. Then, the computer system automatically determines from the design one or more areas of the design that are prone to causing overlay errors. Further, an indication of the determined one or more areas is output by the computer system to an inspection system for use in inspecting a multi-patterned device fabricated in accordance with the design.
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