GRAPHENE BASED IN-PLANE MICRO-SUPERCAPACITORS

摘要

An integrated circuit with improved performance includes conventional integrated circuit layers including at least one integrated circuit power layer; an insulator material layer with a lattice structure deposited across the conventional integrated circuit layers; a first graphene layer deposited on the insulator material layer; a dielectric layer deposited on the first graphene layer; a second graphene layer deposited on the dielectric layer; a top passivation layer deposited on the second graphene layer; a first metallization post extending from the first graphene layer to the at least one integrated circuit power layer; and a second metallization post extending from the second graphene layer to the at least one integrated circuit power layer.