首页> 外国专利> FABRY-PÉROT INTERFEROMETER UNIT, METHOD FOR OPERATING A FABRY-PÉROT INTERFEROMETER UNIT, AND METHOD FOR PRODUCING A FABRY-PÉROT INTERFEROMETER UNIT

FABRY-PÉROT INTERFEROMETER UNIT, METHOD FOR OPERATING A FABRY-PÉROT INTERFEROMETER UNIT, AND METHOD FOR PRODUCING A FABRY-PÉROT INTERFEROMETER UNIT

机译:法布里-珀罗干涉仪单元,操作法布里-珀罗干涉仪单元的方法和生产法布里-珀罗干涉仪单元的方法

摘要

The invention relates to a Fabry-Pérot interferometer unit (100) comprising a first mirror element (102), a second mirror element (104), and at least one plasmonic filter element (112). The first mirror element (102) and the second mirror element (104) are arranged or can be arranged opposite each other in order to form an optical resonator (106) with at least one first light path (108) and a second light path (110). The first light path (108) is paired with a first measurement channel of the Fabry-Pérot interferometer unit (100), and the second light path (110) is paired with a second measurement channel of the Fabry-Pérot interferometer unit (100). The plasmonic filter element (112) is arranged or can be arranged in the first light path (108) and outside of the second light path (110) in order to filter a light beam guided along the first light path (108).
机译:本发明涉及一种法布里-珀罗干涉仪单元(100),其包括第一镜元件(102),第二镜元件(104)和至少一个等离子体滤波器元件(112)。第一反射镜元件(102)和第二反射镜元件(104)彼此相对布置或可以彼此相对布置,以便形成具有至少一个第一光路(108)和第二光路( 110)。第一光路(108)与法布里-珀罗干涉仪单元(100)的第一测量通道配对,第二光路(110)与法布里-珀罗干涉仪单元(100)的第二测量通道配对。等离子体滤波器元件(112)被布置或可以被布置在第一光路(108)中和第二光路(110)的外部,以便对沿着第一光路(108)引导的光束进行滤波。

著录项

  • 公开/公告号WO2018050346A1

    专利类型

  • 公开/公告日2018-03-22

    原文格式PDF

  • 申请/专利权人 ROBERT BOSCH GMBH;

    申请/专利号WO2017EP69314

  • 申请日2017-07-31

  • 分类号G01J3/26;G01J3/28;G01J3/36;B82Y20;

  • 国家 WO

  • 入库时间 2022-08-21 12:45:00

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