A MEASUREMENT SUBSTRATE, A MEASUREMENT METHOD AND A MEASUREMENT SYSTEM

摘要

A method of measuring wear of a substrate holder that is configured to hold a production substrate, the method comprising: clamping a measurement substrate to the substrate holder; and measuring strain in the measurement substrate to generate a measurement result. The measurement substrate may comprise a body having dimensions similar to that of the production substrate; and a strain sensor in the body configured to measure strain in a peripheral portion of the measurement substrate.