首页> 外国专利> METHOD AND APPARATUS FOR DESIGNING MODEL-BASED CONTROL HAVING SPATIAL ROBUSTNESS FOR MULTIPLE-ARRAY CROSS- DIRECTION (CD) WEB MANUFACTURING OR PROCESSING SYSTEMS OR OTHER SYSTEMS

METHOD AND APPARATUS FOR DESIGNING MODEL-BASED CONTROL HAVING SPATIAL ROBUSTNESS FOR MULTIPLE-ARRAY CROSS- DIRECTION (CD) WEB MANUFACTURING OR PROCESSING SYSTEMS OR OTHER SYSTEMS

机译:用于设计具有多空间交叉(CD)Web制造或处理系统或其他系统的空间鲁棒性的基于模型的控制的方法和装置

摘要

A method includes obtaining (902) one or more models (304) associated with a model-based controller (104, 306) in an industrial process (100, 302) having multiple actuator arrays (114, 116, 118, 120) and performing (906) spatial tuning of the controller. The spatial tuning includes identifying weighting matrices that suppress one or more frequency components in actuator profiles of the actuator arrays. The spatial tuning could also include finding (908) a worst-case cutoff frequency over all output channels for each process input, designing (910) the weighting matrices to penalize higher-frequency actuator variability based on the model(s) and the cutoff frequencies, and finding (912) a multiplier for a spatial frequency weighted actuator variability term in a function that guarantees robust spatial stability. The controller could be configured to use a function during control of the industrial process, where a change to one or more terms of the function alters operation of the controller and the industrial process and at least one term is based on the weighting matrices.
机译:一种方法包括在具有多个致动器阵列(114、116、118、120)的工业过程(100、302)中获得(902)与基于模型的控制器(104、306)相关联的一个或多个模型(304)并执行(906)控制器的空间调整。空间调谐包括识别加权矩阵,该加权矩阵抑制致动器阵列的致动器轮廓中的一个或多个频率分量。空间调整还可以包括针对每个过程输入在所有输出通道上找到(908)最坏情况的截止频率,设计(910)加权矩阵以基于模型和截止频率来惩罚高频致动器的可变性。以及找到(912)函数中用于确保稳健的空间稳定性的空间频率加权执行器可变性项的乘数。控制器可以被配置为在工业过程的控制期间使用功能,其中对该功能的一个或多个项的改变会改变控制器和工业过程的操作,并且至少一项基于权重矩阵。

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