FORMING METHOD OF METAL OXIDE LAYER ON GRAPHENE METAL OXIDE LAYER ON GRAPHENE FORMED THEREBY AND ELECTRONIC DEVICE COMPRISING THE METAL OXIDE LAYER ON GRAPHENE

摘要

The present invention relates to a metal oxide layer on graphene with high light transmittance, a manufacturing method thereof, and an electronic device including the metal oxide layer on graphene. According to one embodiment of the present invention, the manufacturing method of the metal oxide layer on graphene comprises the steps of modifying a surface of the graphene and forming the metal oxide layer on the graphene using atomic layer deposition (ALD).