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Flow control device, flow rate calibration method of flow control device, flow measurement device and flow measurement method using flow measurement device
Flow control device, flow rate calibration method of flow control device, flow measurement device and flow measurement method using flow measurement device
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机译:流量控制装置,流量控制装置的流量校准方法,流量测量装置以及使用该流量测量装置的流量测量方法
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摘要
A method for calibrating a flow rate control apparatus that performs a flow rate calibration in comparison with a flow rate measured by a flow rate reference unit, the method comprising: setting a predetermined tolerance range for a plurality of flow rate settings; Is set to be smaller than the predetermined tolerance range.
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