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Polymer material for self-organization, self-organizing film, manufacturing method of self-organizing film, pattern and pattern forming method
Polymer material for self-organization, self-organizing film, manufacturing method of self-organizing film, pattern and pattern forming method
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机译:用于自组织的聚合物材料,自组织膜,自组织膜的制造方法,图案和图案形成方法
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摘要
A self-organizing film, a method of manufacturing a self-organizing film, and a method of forming a pattern and a pattern, which can reduce defects based on defective portions in a micro-phase separation and can form fine and minute patterns . The self-organizing polymeric material of the present invention is a triblock copolymer or a triblock copolymer obtained by linking a first polymer block containing a structural unit having a specific structure and a second polymer block containing a structural unit having a specific structure, /RTI ;
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