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Lamellar Grating Mirror tilting angle adjustable lamellar grating type Interferometer structure for the remote gas sensing FTIR
Lamellar Grating Mirror tilting angle adjustable lamellar grating type Interferometer structure for the remote gas sensing FTIR
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机译:遥测气体红外FTIR的层状光栅反射镜倾斜角可调的层状光栅型干涉仪结构
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摘要
The present invention relates to a lamellar grating type interferometer, which is a core part of a Fourier transform infrared spectrometer (FTIR) and, more particularly, to an interferometer with a gradient correction device, which can precisely correct a gradient of a driving mirror and an FTIR using the same. A lamellar grating type interferometer system according to one aspect of the present invention comprises: a mirror support unit including a lamellar grating mirror in one area thereof; a correction key support formed in one side of the mirror support unit to be separated from the mirror support unit; a gap control plate formed between the mirror support unit and the correction key support to be moved in a first direction to control a gap between the mirror support unit and the correction key support and transferring the correction key support in a second direction intersecting with the first direction; and a correction key formed between the mirror support unit and the correction key support and moving in the second direction in accordance with movement of the correction key support. As the correction key moves in the second direction, the gradient of the lamellar grating mirror coming in contact with the correction key is transformed.
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