CHAMBER INTEGRATED RESISTIVITY MEASURING DEVICE FOR REAL-TIME WATER QUALITY MONITORING OF ULTRA PURE WATER PRODUCTION PROCESS AND WATER QUALITY MONITORING METHOD USING THE SAME

摘要

The present invention relates to a chamber integrated resistivity measuring device for real-time water quality monitoring of an ultra-pure water production process and a water quality monitoring method using the same and, more specifically, provides a chamber integrated resistivity measuring device which comprises: a chamber having a cylinder type open portion; an inflow pipe coupled to one side wall of the chamber to be connected to the open portion; a discharge pipe coupled to the other side wall of the chamber to face the inflow pipe, and connected to the open portion; and a sensor coupled to the chamber to seal the open portion, and provided with a through hole that is formed to face the inflow pipe to convert the flow of a fluid flowing into the open portion to a warm current regardless of the flow of the fluid in the inflow pipe.