LASER GENERATOR OF IMAGES FOR WORKING IN THE POLAR SYSTEM OF THE COORDINATE

摘要

The utility model refers to the section of technological equipment of optoelectronics. The laser image generator for operating in the polar coordinate system consists of an optical radiation source, an optical channel with a system of rotary mirrors and acoustooptical modulators controlling the level of the power of optical radiation applied to the photosensitive layer through the micro-objective of the recording head, the linear motion carriage providing, The basis of a laser interferometer and two linear motors, a controlled offset along the R coordinate, the head of a note mounted on it to node movements microlens on Z-coordinate and the autofocus microscope objective, the rotation assembly comprising a spindle and the stage for fixing the glass preform with a photosensitive layer and a granite slab, mounted on a vibration isolating base. In the body of the granite slab, a longitudinal groove is formed on the side of its working surface, the middle section of which lies in the main plane of the laser image generator coinciding with the axis of rotation of the rotor of the spindle of the rotation unit and the displacement vector of the carriage. In the formed longitudinal groove, two rectangular granite blocks are inserted symmetrically relative to the axis of rotation of the rotor of the spindle, the vertical walls of which are guides for the first group of aerostatic bearings of the displacement carriage. And on the horizontal installed stators of linear motors, the inductors of which are installed on the carriage of linear displacements. In this case, the working surface of the granite slab is the guide for the second group of aerostatic bearings of the carriage of linear displacements. The carriage of linear movements has an additional transverse arch for mounting the recording head and an additional pair of flat aerostatic bearings resting on the working surface of the granite plate. The recording head with the auto focus system of the micro lens is installed on the transverse arch of the carriageand linear displacements by means of an additional one-coordinate table, the direction of movement of which is oriented. The optical radiation used for the exposure of the photosensitive layer is fed to the recording head orthogonally to the main plane of the laser image generator using an additional rotary mirror mounted on the edge of the carriage of linear movements in the plane of movement of the additional one-coordinate table. The technical result is a reduction in the error of the formed objects to a level not exceeding 10 nm. 6 ill.