首页> 外国专利> An expansion film, an expansion film manufacturing method, and a stretch film expansion method

An expansion film, an expansion film manufacturing method, and a stretch film expansion method

机译:膨胀膜,膨胀膜的制造方法以及拉伸膜膨胀方法

摘要

An expansion film adapted to be held and expanded by an expansion device in the state where a plate-like workpiece is attached to the expansion film is provided. The expansion device includes a first support unit and a second support unit that are opposed to each other with the workpiece interposed therebetween in a first direction. The first holding unit and the second holding unit are movable away from each other in the first direction. The expansion device further includes a third holding unit and a fourth holding unit facing each other with the workpiece interposed therebetween in a second direction perpendicular to the first direction. The third holding unit and the fourth holding unit are movable away from each other in the second direction. The expansion film has a circumferential area around the workpiece in which the expansion film is adapted to be held by the first, second, third and fourth holding units. The expansion film includes a base film and an adhesion-promoting layer formed on the base film, the adhesion-promoting layer having an adhesion promoter adapted to be reduced by application of ultraviolet light. The adhesion promotion of the adhesion-promoting layer in the peripheral area of the expansion film is lower than that in the other area of the expansion film.
机译:提供一种膨胀膜,该膨胀膜适于在将板状工件安装到膨胀膜的状态下由膨胀装置保持和膨胀。膨胀装置包括第一支撑单元和第二支撑单元,第一支撑单元和第二支撑单元彼此相对,并且工件沿第一方向插入在第一支撑单元和第二支撑单元之间。第一保持单元和第二保持单元可沿第一方向彼此远离地移动。扩展装置还包括彼此相对的第三保持单元和第四保持单元,在垂直于第一方向的第二方向上,在第一保持单元和第四保持单元之间插入有工件。第三保持单元和第四保持单元可沿第二方向彼此远离地移动。膨胀膜具有围绕工件的圆周区域,膨胀膜适于在其中被第一,第二,第三和第四保持单元保持。所述膨胀膜包括基膜和形成在所述基膜上的增粘层,所述增粘层具有适于通过施加紫外线而减少的增粘剂。在膨胀膜的周边区域中的粘合促进层的粘合促进低于在膨胀膜的其他区域中的粘合促进。

著录项

  • 公开/公告号DE102017209185A1

    专利类型

  • 公开/公告日2017-12-07

    原文格式PDF

  • 申请/专利权人 DISCO CORPORATION;

    申请/专利号DE201710209185

  • 发明设计人 SHINICHI FUJISAWA;RYOJI TANIMOTO;

    申请日2017-05-31

  • 分类号H01L21/301;

  • 国家 DE

  • 入库时间 2022-08-21 12:33:58

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号