MICRO-ELECTRO-MECHANICAL MICRO-MANIPULATION DEVICE WITH PIEZOELECTRIC DRIVING, MOVABLE IN THE PLANE

摘要

The MEMS manipulation device (1) has a first and a second manipulation arms (40, 41) carrying respective mutually facing gripping elements (6, 7). The first manipulation arm (40) is formed by a driving arm (2) and by an articulated arm (4) hinged together through an articulation structure (10). The first driving arm (2) comprises a first beam element (20) and a first piezoelectric region (29), on the first beam element. The first articulation structure (10) comprises a first constraint element (31) not deformable in the thickness direction, and a first hinge structure (32), interposed between the first driving arm (2), the first articulated arm (4), and the first constraint element (31).