Method of manufacturing physical quantity sensor, physical quantity sensor, inertial measurement device, mobile body positioning device, portable electronic device, electronic device, mobile body

摘要

A physical quantity sensor manufacturing method, a physical quantity sensor, an inertial measurement device, a mobile positioning device, a portable electronic device, an electronic device, and a mobile object, which are easy to manufacture and can effectively reduce unnecessary vibrations. . A physical quantity sensor according to the present invention includes a vibrating body, and a spring that supports the vibrating body so as to be capable of vibrating in a first direction, and the spring is in a second direction orthogonal to the first direction. It has an arm extended along, and a protection beam arranged adjacent to one side in the first direction with respect to the arm and extending in the second direction. [Selected figure] Figure 17