電子デバイス、電子機器および移動体

摘要

To provide an electronic device capable of suppressing change over time of the output of a sensor.SOLUTION: An inertia sensor device 1 comprises: a support substrate 27 supporting a sensor 28; and a base part 3 for fixing the support substrate 27. The support substrate 27 and the package 2 are solid phase bonded to each other. The support substrate 27 and the base part 3 are solid phase bonded to each other being interposed by a bonding film 26.SELECTED DRAWING: Figure 2