微粒子数検出器

摘要

To provide a particle number detector with a function of measuring a gas flow rate.SOLUTION: A control unit included in a particle number detector obtains a gas flow rate using a laminar flow tube part, and obtains the number of particles per unit volume in the gas on the basis of the gas flow rate and physical quantities changing in accordance with the electric charge of the charged particles collected by charged particle collecting electrodes.SELECTED DRAWING: Figure 2