YTTRIUM BASED FLUORIDE THERMAL SPRAY COATING, THERMAL SPRAY MATERIAL FOR FORMING THE SAME, METHOD FOR FORMING THERMAL SPRAY COATING AND CORROSION-RESISTANT COATING INCLUDING THERMAL SPRAY COATING

摘要

SOLUTION: There is provided a yttrium based fluoride thermal spray coating formed on the surface of a base material, having a thickness of 10-500 μm, having a yttrium based fluoride crystal structure including YF, YOFand/or YOF and having an oxygen concentration of 2-4 mass% and a hardness of 350-470 HV.EFFECT: The yttrium based fluoride thermal spray coating exhibits excellent corrosion resistance in a halogen based gas atmosphere or a halogen based gas plasma atmosphere and can effectively prevent a base material from being damaged by acid permeation even during acid cleaning to reduce occurrence of particles caused by degraining from a reaction product and the coating as much as possible.SELECTED DRAWING: None