基板処理装置および基板を基板処理装置のテーブルから離脱させる方法

摘要

PROBLEM TO BE SOLVED: To place and separate a substrate on/from a table without imposing damage on the substrate.;SOLUTION: According to an embodiment 1, a substrate processing apparatus is provided, and the substrate processing apparatus includes: a table for holding the substrate; a plurality of lift pins that are arranged on the circumference of the table, are used for arranging the substrate on the table and separating the substrate from the table, and can be moved in a direction vertical to a surface of the table; a driving mechanism having a motor for moving each of the lift pins in a direction vertical to the surface of the table; and a control device that controls the driving mechanism. The control device is configured so that each of the lift pins can be moved at a first speed and at a second speed different from the first speed.;SELECTED DRAWING: Figure 7;COPYRIGHT: (C)2019,JPO&INPIT