Ion beam functional permeable membrane, beam line device using ion beam functional permeable membrane, filter device using ion beam functional permeable membrane, adjustment method of filter device

摘要

To provide a functional membrane for ion beam transmission capable of enhancing ion beam transmittance and improving beam emittance. A functional membrane for ion beam transmission according to the present invention is used in a beam line device through which an ion beam traveling in one direction passes and has a channel. The axis of the channel is substantially parallel to the travel direction of the ion beam.