The device of Bernoulli Jacob's hand and semiconductors manufacture

摘要

PROBLEM TO BE SOLVED: To hold a work-piece such as a semiconductor substrate having a different size without troublesome works, in a semiconductor manufacturing step or the like.SOLUTION: There is provided a Bernoulli hand comprising: a plurality of inclined parts 21 and 41 provided on a holding surface holding a disc-like work-piece 60 and at a position corresponding to a circumference of the work-piece at least at three points surrounding the center of the work-piece 60, and having a shape inclined outward from the holding surface toward the work-piece 60; and an inclined part moving mechanism moving at least one of the inclined parts 21 and 41 in a radial direction of the work-piece. It is preferred that the inclined parts 21 and 41 have smooth inclined surfaces, respectively.