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There are two different environment for the first and second transfer space of sealed attachment tool between closed structure substance transmission channels
There are two different environment for the first and second transfer space of sealed attachment tool between closed structure substance transmission channels
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机译:封闭结构物质传输通道之间的密封附件工具的第一传输空间和第二传输空间有两种不同的环境
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摘要
PROBLEM TO BE SOLVED: To provide a hermetic connection structure in which a material can be transferred between a first transfer space in a non-cleaned environment and a second transfer space where various treatments are performed on a cleaned material via a material transfer opening, without being contaminated by the first transfer space.SOLUTION: A plurality of flange rings 2, 3, 5 to 8 are sequentially and hermetically mounted on a material transfer opening, from a peripheral edge on a side close to first and second transfer spaces toward the center. A connection member 10 is integrally fixed to the center opening of the innermost flange ring 8. The flange ring 8 can slide and rotate on an adjacent flange ring 6 having an inner side with which the flange ring 8 hermetically engages; and the flange ring 8 also rotates by interlocking with the connection member 10. The flange ring 8 has, on a second transfer space side, a door body 11 for opening and closing the center opening of the connection member 10, and a locking/releasing mechanism of the door body 11, and has, on a first transfer space side, an opening/closing operation member and a locking/releasing operation member of the door body 11 and a rotation handle 9 of the connection member 10.SELECTED DRAWING: Figure 5
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