Method for enhancing stability, robustness and throughput of semiconductor device test machines in low temperature conditions

摘要

An apparatus includes a platform and a test board mounted on the platform. The platform generally comprises (i) a transducer array configured to generate ultrasonic vibrations and (ii) a controller configured to control the transducer array in response to measurements of moisture content of air around the platform. The test board may be configured to apply test signals to and receive test responses from a semiconductor device under test. The platform may be configured to utilize the ultrasonic vibrations to inhibit frost formation between the semiconductor device under test and a test header providing a low temperature test condition.