ESTIMATOR, ESTIMATION METHOD, PROGRAM AND STORAGE MEDIUM WHERE PROGRAM STORED FOR MODEL PARAMETER ESTIMATION AND MODEL PARAMETER ESTIMATION SYSTEM

摘要

A model parameter value estimator includes a plant model which is a preset physical model simulating an operation of a target product, to which a model parameter value is input, and which computes a process value. A measurement value of the target product and a plurality of process values computed by the plant model are input to a model parameter value estimation section, which performs Bayesian updating on a probability density function accumulated in an accumulation section while regarding a function generated on the basis of accuracy evaluation of each of the plurality of process values with respect to the measurement value as a likelihood function. It is thereby possible to provide an estimator and an estimation method for model parameter value estimation capable of estimating a model parameter value even if a distribution profile and statistics for the probability density function are unknown or difficult to estimate.