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OBSERVATION DEVICE, OBSERVATION METHOD, AND STORAGE MEDIUM
OBSERVATION DEVICE, OBSERVATION METHOD, AND STORAGE MEDIUM
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机译:观测装置,观测方法和存储介质
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摘要
An observation device that has an image sensor that forms images of a specimen, comprising: an imaging position change circuit that changes imaging position of image sensor, a temperature sensor that measures temperature within the observation device, and a controller that controls operation of the imaging position change circuit and the image sensor, wherein the controller causes execution of an operation sequence that repeatedly executes change in imaging position of the image sensor by the imaging position change circuit and imaging operation of the image sensor, stops the operation sequence if the measured temperature exceeds a given threshold, transitions to a halt sequence where a state in which change of imaging position of the image sensor and an imaging operation are prohibited continues for a given time, and repeats the operation sequence and the halt sequence.
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