A RARE-EARTH PERMANENT MAGNETIC COMPOSITE FILM AND ITS PREPARATION TECHNIQUES AND APPLICATIONS

摘要

Disclosed are a composite rare earth permanent magnet thin film, a preparation method thereof and an application device thereof. The thin film comprises a substrate and a rare earth permanent magnet thin film grown on the substrate, wherein the substrate is shape memory alloy. The substrate is subjected to growth thin film processing by adopting magnetron sputtering, vacuum evaporation, electro-deposition, physical vapor deposition or chemical vapor deposition to obtain the rare earth permanent magnet thin film through growing. According to the composite rare earth permanent magnet thin film disclosed in the invention, through a shape memory effect generated in a substrate martensite phase transformation process, lattice mismatch is formed in the interface of the thin film and the substrate, so that stress can be introduced continuously and controllably to the thin film, regulation and optimization of the performance of the rare earth permanent magnet thin film can be realized, and thedevelopment requirements of miniaturization, light weight and thin appearance, and high performance of electronic products can be satisfied.