REACTION CONTROL AND MASS SPECTROMETRY STATION FOR JOINT USE WITH RESPECT TO IN SITU POOL OF X-RAY EXPRESSING APPARATUS

摘要

The present invention relates to a reaction control and mass spectrometry station for joint use with respect to an in situ pool of an X-ray expressing apparatus. The reaction control and mass spectrometry station comprises a reacting gaseous component control module and an inline gaseous component analysis module. The invention also comprises a modification based on an existing vacuum pipe part. The modified existing vacuum pipe part is connected to an analysis station via a general air exhaust outlet, an in situ reaction pool exhaust opening, and an in situ reaction pool mixed gas sampling inlet. The modification is characterized in that the vacuum pipe part is additionally provided with a mass spectrometer sampling opening, a sampling capillary, and a control valve. The present invention has the following advantages: a sampling time delay when analyzing mass spectrometry sampled gas components can be ignored, and continuous, real-time, and high time resolution sampling analysis requirements of in situ analysis are met; under working conditions of the X-ray expressing apparatus, at the same time as an electronic structure/crystal structure is acquired, precise information on ambient gas components is acquired simultaneously, thus expanding apparatus functions and implementing in situ multidimensional expression.