A METHOD FOR FORMING YTTRIUM OXIDE FLUORIDE COATING FILM AND YTTRIUM OXIDE FLUORIDE COATING FILM PREPARED THEREBY

摘要

Various embodiments of the present invention relate to a method for forming an yttrium oxide fluoride coating film and an yttrium oxide fluoride coating film formed thereby. The technical task to be solved is to provide a method for forming an yttrium oxide fluoride coating film which has no or extremely small pores therein and a nanostructure to increase light-permeability thereof, and has high hardness and high bonding strength and thus can protect a transparent window of a display device, and yttrium oxide fluoride coating film formed thereby. To this end, the method for forming an yttrium oxide fluoride coating film according to various embodiments of the present invention comprises the steps of: providing a pretreated YOF powder having a particle diameter ranging from 0.1 to 12μm; receiving a transfer gas supplied from a transfer gas supply unit and receiving the pretreated YOF powder supplied from a powder supply unit to transfer the pretreated YOF powder in an aerosol state; and colliding/smashing (spraying) the pretreated YOF powder transferred in the aerosol state with/onto a substrate in a process chamber to form an yttrium oxide fluoride coating film on the substrate.