METHODS OF FABRICATION OF NANO-SENSOR AND NANO-SENSOR ARRAY

摘要

Methods of fabrication and nano-sensor and nano-sensor array thereof are provided. A sensing electrode assembly can be patterned on a sacrificial layer of a substrate. The sensing electrode assembly can comprise a pair of contact pads and an electrode element coupled to and disposed between the pair of contact pads. The sensing electrode assembly can be formed on the patterned sensing electrode assembly. The sacrificial layer below a portion of the electrode element can be removed to obtain a suspended electrode element. The suspended electrode element can be oxidized at a first predetermined temperature to obtain a pair of electromigrated regions and a notch portion between the pair of the electromigrated regions. The notch portion can be used to detect a gaseous component in an ambient gas at a second predetermined temperature.