METHOD FOR DETERMINING A CORRECTED DIMENSIONAL PARAMETER VALUE RELATING TO A FEATURE FORMED BY A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUSES

摘要

A method of determining a corrected dimensional parameter value relating to a feature formed by a lithographic process, the corrected dimensional parameter value being corrected for a measurement effect on the dimensional parameter, the method including: performing a measurement to obtain at least two measurement values for the dimensional parameter; determining the measurement effect from the at least two measurement values; and determining the corrected dimensional parameter value from the determined measurement effect.