首页> 外国专利> QUANTUM DOT X-RAY RADIATION DETECTOR ARRAY WITH IMPROVED CHARGE COLLECTION EFFICIENCY AND/OR DETECTION EFFICIENCY

QUANTUM DOT X-RAY RADIATION DETECTOR ARRAY WITH IMPROVED CHARGE COLLECTION EFFICIENCY AND/OR DETECTION EFFICIENCY

机译:电荷收集效率和/或检测效率得到改善的量子点X射线辐射探测器阵列

摘要

A radiation sensitive detector array (112) of an imaging system (100) includes a first detector pixel (200). The first detector pixel includes a first bottom contact (118) and a first porous silicon structure (120). The first porous silicon structure includes a first plurality of columns of silicon (202). The first porous silicon structure further includes a first plurality of pores (204) with first quantum dots (122) interlaced with the first plurality of columns of silicon. The first porous silicon structure further includes first bulk silicon (208) below the first plurality of columns of silicon and the first plurality of pores. The first bulk silicon is adjacent to the bottom contact. The first porous silicon structure further includes a first electrically conductive via (124) integrated in the first bulk silicon adjacent to at least one of the first plurality of pores with the first quantum dots and in electrical communication with the first bottom contact.
机译:成像系统(100)的辐射敏感探测器阵列(112)包括第一探测器像素(200)。第一检测器像素包括第一底部接触(118)和第一多孔硅结构(120)。第一多孔硅结构包括硅的第一多个列(202)。第一多孔硅结构还包括第一多个孔(204),第一量子点(122)与第一多个硅列交错。第一多孔硅结构还包括在第一多个硅柱和第一多个孔下方的第一块状硅(208)。第一块状硅与底部触点相邻。所述第一多孔硅结构还包括第一导电通孔(124),所述第一导电通孔(124)与所述第一量子点集成在与所述第一多个孔中的至少一个相邻的所述第一块状硅中,并且与所述第一底部触点电连通。

著录项

  • 公开/公告号WO2019185376A1

    专利类型

  • 公开/公告日2019-10-03

    原文格式PDF

  • 申请/专利权人 KONINKLIJKE PHILIPS N.V.;

    申请/专利号WO2019EP56633

  • 发明设计人 CHAPPO MARC ANTHONY;

    申请日2019-03-15

  • 分类号G01T1/24;G01T1/208;

  • 国家 WO

  • 入库时间 2022-08-21 11:53:05

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