首页> 外国专利> PRECIOUS METAL COATED SILVER WIRE FOR BALL BONDING AND METHOD FOR MANUFACTURING SAID PRECIOUS METAL COATED SILVER WIRE FOR BALL BONDING, AND SEMICONDUCTOR DEVICE USING PRECIOUS METAL COATED SILVER WIRE FOR BALL BONDING AND METHOD FOR MANUFACTURING SAID SEMICONDUCTOR DEVICE

PRECIOUS METAL COATED SILVER WIRE FOR BALL BONDING AND METHOD FOR MANUFACTURING SAID PRECIOUS METAL COATED SILVER WIRE FOR BALL BONDING, AND SEMICONDUCTOR DEVICE USING PRECIOUS METAL COATED SILVER WIRE FOR BALL BONDING AND METHOD FOR MANUFACTURING SAID SEMICONDUCTOR DEVICE

机译:用于球焊的贵金属包覆银线及其制造方法用于球焊的所述贵金属包覆银线以及使用用于球焊的贵金属包覆银线的半导体装置及制造所述半导体装置的方法

摘要

The purpose of the present invention, in a semiconductor device for which an electrode of a semiconductor chip and an electrode of a lead frame, etc., are connected by a bonding wire, is to provide a precious metal coated silver bonding wire for which corrosion of a bonding interface is suppressed, and for which electrification failure does not occur, even under severe high temperature, high humidity conditions of an automobile, etc. This precious metal coated silver wire for ball bonding of the present invention is characterized in that in a precious metal coated silver wire comprising a precious metal coating layer on a core material consisting of pure silver or a silver alloy, the wire includes at least one type of sulfur group element, the precious metal coating layer has at least one layer that is a palladium layer, the content of palladium with respect to the wire overall in total is 0.01 mass%-5.0 mass% [inclusive], and the content of the sulfur group element with respect to the wire overall in total is 0.1 mass ppm-100 mass ppm [inclusive].
机译:本发明的目的在于提供一种通过键合线将半导体芯片的电极与引线框的电极等连接的半导体装置,其特征在于,提供一种被腐蚀的贵金属包覆银键合线。本发明的这种用于球焊的贵金属涂覆的银线的特征在于,即使在严酷的高温,高湿度的汽车等环境下,也可以抑制键合界面的翘曲,并且不会发生带电故障。在由纯银或银合金组成的芯材上包括贵金属涂层的贵金属涂覆的银线,该线包括至少一种类型的硫族元素,贵金属涂层具有至少一层为钯的层相对于金属丝层,钯的总量合计为0.01质量%-5.0质量%(含),硫族元素的含量相对于金属丝的合计为0.01质量%-5.0质量%。焊丝的总合计为0.1质量ppm-100质量ppm [含]。

著录项

  • 公开/公告号WO2019193771A1

    专利类型

  • 公开/公告日2019-10-10

    原文格式PDF

  • 申请/专利权人 TANAKA DENSHI KOGYO K.K.;

    申请/专利号WO2018JP16201

  • 发明设计人 CHIBA JUN;ANTOKU YUKI;KAWANO SHOTA;

    申请日2018-04-19

  • 分类号H01L21/60;

  • 国家 WO

  • 入库时间 2022-08-21 11:52:55

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