Methods for tuning parameter settings for performing ultrasound scanning probe microscopy for subsurface imaging, scanning probe microscopy systems and computer program products

摘要

Method for tuning parameter settings for performing ultrasound scanning probe microscopy for subsurface imaging, scanning probe microscopy systems and computer program products. This document relates to a method of tuning a scanning probe microscope system. The method comprising the steps of: a) applying an ultrasonic vibration signal comprising a first frequency and a second frequency to a sample; b) sweeping the first frequency over a first frequency range at a first location of the probe tip, and acquiring a first signal; c) sweeping the first frequency at least in the first frequency range at a second location of the probe tip, and acquiring a second signal; and d) analyzing the first and second signals to obtain a difference characteristic that is dependent on the first frequency. The first and second locations are selected to be different in structure below the surface of the sample at the first and second locations.