CONSTRUCTION OF REFERENCE SPECTRA WITH VARIATIONS IN ENVIRONMENTAL EFFECTS

摘要

A method of generating a library of reference spectra includes: storing at least one reference spectrum; Storing a plurality of different transmission curves; And computing a modified reference spectrum from the reference and transmission curves for at least two transmission curves of the plurality of different transmission curves to generate a plurality of modified reference spectra. The transmission curves represent distortions to the spectrum introduced due to variations in components in the optical path prior to the substrate surface.