IGO IGO Method of fabricating of IGO thin film and IGO thin film transistor

摘要

Provided is a method for manufacturing an IGO thin film. The method for manufacturing the IGO thin film can comprise: a step of preparing a substrate; a step of providing an indium precursor and a gallium precursor on the substrate; and a step of providing a reactive gas containing hydrogen peroxide on the substrate to manufacture an indium gallium oxide thin film.