Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramics

摘要

Precise screen printing is described that enables sub-micron uniformity of metallization materials to be printed on a green sheet ceramic. In some instances, the puck is formed to have electrical traces by screen printing a paste containing the metal on a ceramic green sheet in the form of electrical traces, and processing the printed green sheet to form the puck of the workpiece carrier do. In some examples, the step of printing includes applying a squeegee of the screen printer to the green sheet to be printed, in the squeezing direction, while the green sheet is on the printer bed of the screen printer. The method includes the steps of mapping the printer bed at multiple locations along the squeeze direction, identifying non-uniformities in the printer bed mapping, and identifying the non-uniformities in the printer bed mapping, And modifying the printer controller.