Pixel array structure for terahertz image sensor terahertz image sensor method of manufacturing the same and image apparatus comprising the same

摘要

According to the present invention, disclosed are a pixel array structure for a terahertz image sensor, a terahertz image sensor, a method of manufacturing the same, and a video device including the same. The pixel array structure for a terahertz image sensor of the present invention comprises: an effective pixel array in which a plurality of antennas sensing terahertz signals, heating elements generating heat, first bolometers measuring heat, and effective unit pixels having a first signal line for transmitting a signal are arranged at regular intervals to sense a terahertz signal; and a reference pixel array which is arranged so as to be spaced apart from the effective pixel array, and in which a plurality of second bolometers for measuring heat and reference unit pixels having a second signal line for transmitting a signal are arranged at regular intervals to serve as a reference for correcting a resistance deviation of the bolometer by pixels.