VAPORIZER FOR PARYLENE DEPOSITION EQUIPMENT CAPABLE OF CONTROLLING DISCHARGE OF GAS PHASE PARYLENE DIMER, OPERATION METHOD THEREOF, AND PARYLENE DEPOSITION EQUIPMENT HAVING SAME

摘要

The present invention relates to a vaporizer for parylene deposition equipment capable of controlling discharge of gas phase parylene dimer, an operation method thereof, and parylene deposition equipment having the same. The vaporizer for parylene deposition equipment capable of controlling discharge of gas phase parylene dimer comprises: a container in which parylene dimer powder is stored; a discharge pipe connected to the container; a discharge control unit installed in the discharge pipe and controlling discharge of the gas phase parylene dimer generated from the parylene dimer powder in the container; and a heat insulation unit covering the discharge pipe and the discharge control unit and keeping temperature of the discharge pipe and the discharge control unit higher than vaporization temperature of the parylene dimer powder.;COPYRIGHT KIPO 2019