METHOD FOR EXTRACTING HIGH FREQUENCY BAND CAPACITANCE USING TIME-DOMAIN REFLECTION MEASUREMENT SIGNAL, APPARATUS THEREOF, AND COMPUTER READABLE RECORDING MEDIUM

摘要

The present invention relates to a method for analyzing a frequency feature of a time-domain reflection measurement signal, an apparatus thereof, and a computer readable recording medium. More specifically, according to one embodiment of the present invention, the apparatus for measuring time-domain reflection is electrically connected to a test pattern of a semiconductor device, transmits a signal, and then calculates capacitance and impedance using a reflected voltage value to output a capacitance-frequency curve and an impedance-frequency curve.;COPYRIGHT KIPO 2019