RC RC High damping reinforced concrete grid beam and high damping reinforced concrete grid beam structure using it

摘要

The present invention relates to an RC grid beam, in which vibration transmission can be significantly attenuated, and the concrete forming the RC grid beam is made of polymer concrete to which polymer is added. Since the vibration can be effectively attenuated, the semiconductor productivity can be improved by reducing the defect rate, thereby providing a high-damping RC lattice beam that maximizes the performance of precise exposure equipment.