Controlled control of a scanner with frequency domain analysis of a control deviation

摘要

The invention has for its object to provide a particularly reliable controlled control for a scanner. According to various examples, this object is achieved by an analysis of a control deviation in the frequency domain. For example, an input signal indicative of a time dependence of the bias between an actual pose and a target pose of a diverter unit of the scanner may be developed into a plurality of error components (710-713) at multiple frequencies (311-314). Then, for each of the plurality of error components, a corresponding correction signal component can be determined. Such techniques can be used, for example, in a laser scanning microscope.