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Ferroelectric thin film multilayer substrate, ferroelectric thin film element, and method for manufacturing ferroelectric thin film multilayer substrate
Ferroelectric thin film multilayer substrate, ferroelectric thin film element, and method for manufacturing ferroelectric thin film multilayer substrate
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机译:铁电薄膜多层基板,铁电薄膜元件以及铁电薄膜多层基板的制造方法
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摘要
There is provided a ferroelectric thin-film laminated substrate, including a substrate, and further including a lower electrode layer, a ferroelectric thin-film layer, an upper electrode intermediate layer, and an upper electrode layer being sequentially stacked on the substrate, in which: the lower electrode layer is made of platinum or a platinum alloy; the ferroelectric thin-film layer is made of a sodium potassium niobate (typical chemical formula of (K 1-x Na x )NbO 3 , 0.4 ‰¤ x ‰¤ 0.7); the upper electrode layer is made of aluminum or an aluminum alloy; the upper electrode intermediate layer is made of a metal that has less oxidizability than titanium and can generate an intermetallic compound with Aluminum; and a part of the upper electrode intermediate layer and a part of the upper electrode layer are alloyed.
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机译:提供一种铁电薄膜层叠基板,其包括基板,并且还包括依次堆叠在基板上的下电极层,铁电薄膜层,上电极中间层和上电极层,其中:下电极层由铂或铂合金制成;铁电薄膜层由铌酸钠钾((K 1-x Na x)NbO 3的典型化学式,0.4‰x‰0.7)制成;上电极层由铝或铝合金制成。上电极中间层由氧化性比钛低并且可以与铝产生金属间化合物的金属制成。上部电极中间层的一部分和上部电极层的一部分被合金化。
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