Processes for manufacturing small sources for producing ionizing radiation, assemblies containing multiple sources and sources

摘要

The present invention relates to a radiation source for producing ionizing radiation, in particular X-rays, an assembly containing multiple sources, and a process for producing the radiation source. The radiation source is・ Vacuum chamber (12) and A cathode capable of emitting an electron beam (18) into a vacuum chamber (12), the electron beam (18) forming around the axis (19), with the cathode. An anode (76) that receives an electron beam (18), including a target (20) capable of generating ionizing radiation (22) from the energy received from the electron beam (18), the ionizing radiation (22). Contains an anode (76) generated towards the outside of the vacuum chamber (12), the anode (76) contains a cavity (80), and an electron beam (18) enters the cavity (80). The walls (88, 90) of the cavity (80) are intended to reach the target (20), and the parasitic ions (91) that can be released into the vacuum chamber (12) by the target (20). At least one getter (92) that forms a radiation cage that blocks) and is separated from the walls (88, 90) of the cavity (80) and is intended to capture the parasitic ion (91). Is placed in the cavity (80).