Thermal conductivity measuring device, thermal conductivity measuring method, and vacuum degree evaluation device

摘要

PROBLEM TO BE SOLVED: To measure accurate heat conductivity in a short time.SOLUTION: A heat conductivity measurement device includes: a heat generation source arranged so as to contact with an object whose heat conductivity is measured; a heat resistance material arranged so as to contact the heat generation source; at least a pair of differential thermocouples configured to measure a voltage value resulting from temperature difference between two points of the heat resistance material generated by flowing of heat from the heat generation source; and a calculation device configured to calculate time change rate of output voltage of the differential thermocouple, and calculate heat conductivity of the object to be measured on the basis of the calculated time change rate.SELECTED DRAWING: Figure 2