Apparatus for contactlessly transporting a carrier in a deposition system, system for contactlessly transporting a carrier, carrier being transported in a deposition system without contact, and method for transporting a carrier in a deposition system

摘要

The present disclosure provides an apparatus for contactlessly transporting a carrier (220) in a deposition system. The apparatus includes a drive structure (210) for moving the carrier (220) in the transport direction (1) and a position detection device (215) in the drive structure (210). [Selection] Figure 2