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Systems and methods for dicing samples using a bessel beam matrix
Systems and methods for dicing samples using a bessel beam matrix
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机译:使用贝塞尔光束矩阵对样品进行切割的系统和方法
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摘要
Systems and methods for dicing a sample by a Bessel beam matrix are disclosed. The method for dicing a sample by a Bessel beam matrix may comprise generating a Bessel beam matrix including multiple Bessel beams arranged in a matrix form, according to a predetermined dicing layout of the sample; controlling a focus position of each Bessel beam in the generated Bessel beam matrix; and focusing simultaneously the Bessel beams of the Bessel beam matrix at the respective controlled focus positions within the sample for dicing.
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